A built-in sensor module based on wireless technology that transmits various information such as vibration, slope, speed, and motor status (torque, speed) generated in semiconductor production equipment such as the OHT and stocker to the higher-level server through the analog interface.
Slim design for installation inside the facilities
Collects motor status information through an analog interface (8 channels, 16 bits, max. 2 KHz ADC)
Equipped with high-performance processors
Collects sampling data of up to 1 KHz from six-axis acceleration sensors
Two-axis angle calculation function
Setting defect standards / Collecting defect data
Connecting higher-level servers and wireless technology
S/W update / Storing error logs
02
External Anomaly Detection IoT Module / Analog
A built-in sensor module based on wireless technology that transmits various information such as vibration, slope, speed, and motor status (torque, speed) generated in semiconductor production equipment such as the OHT and stocker to the higher-level server through the analog interface.
Compact design for external installation
Collects motor status information through an analog interface (8 channels, 16 bits, max. 2 KHz ADC)
Equipped with high-performance processors
Collects sampling data of up to 1 KHz from six-axis acceleration sensors
Two-axis angle calculation function
Setting defect standards / Collecting defect data
Connecting higher-level servers and wireless technology
S/W update / storing error logs
03
External Anomaly Detection IoT Module / EtherCAT
A built-in sensor module based on wireless technology that transmits information such as vibration, slope, speed, and motor status (torque, speed) generated in semiconductor production equipment such as the OHT and stocker to the higher-level server through the EtherCAT interface.
Compact design for external installation
Collects motor status information through the EtherCAT interface
Equipped with high-performance processors
Collects sampling data of up to 1 KHz from six-axis acceleration sensors
